Thermal Technology LLC

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VACUUM & CONTROLLED ATMOSPHERE FURNACES FOR REACTION BONDING OF SILICON NITRIDE OR SILICON CARBIDE
 

General Description

Thermal Technology's reaction bonding furnaces are designed for reaction bonding of silicon nitride or silicon carbide ceramics. Furnaces are rated to 1500°C for gas phase bonding of silicon nitride and related materials and to 2200°C for liquid phase bonding of silicon carbide.
 
Each furnace is supplied as a complete system including: vacuum chamber, heat zone, power supply, vacuum pump, and a programmable control system. Gas flow control systems are included with 1500°C furnaces. Additional options and upgrades are available to meet individual requirements.
Top Loader Model 612Top Loader
(Model 612)
Front Loader Model 121212Front Loader
(Model 121212)
Bottom Loader Model 1624Bottom Loader
(Model 1624)

Chamber and Heat Zone

Standard vacuum vessels are made of mild steel which is coated internally to inhibit oxidation and improve vacuum performance. Stainless steel chambers, water jacket and flanges are optionally available for areas with poor water quality or when the ultimate in cleanliness is required.
 
Furnaces rated to 2200°C for processing silicon carbide are provided with graphite heating elements and graphite insulation. Furnaces rated to 1500°C for silicon nitride can be furnished with either graphite or metallic heat zones. Metallic heat zones use tungsten heating elements which are resistant to silicide formation. Similarly, a tungsten inner radiation shield is used instead of molybdenum to prevent interaction and prolong heat zone life.
 
Model 612M 
Model 612M
       
Model 121224G 
Model 121224G
  
Loading
Work-Zone
(inches)
Work
Volume
(cubic feet)
Hearth
Capacity
(lbs)
Power*
Supply
(KVA)
Vacuum
Pump
(cfm)
Model
Number
Top
5ø x 10
0.1
10
20/40
16
612
Top
10ø x 14
0.6
50
40/60
27
1218
Front
12 x 12 x 12
1.0
100
60/80
27
121212
Bottom
13ø x 18
1.4
150
80/110
50
1624
Front
12 x 12 x 24
2.0
200
100/140
50
121224
                   *1500°C/2200°C
 
Atmosphere Control

Reaction bonding furnaces are supplied with two stage mechanical vacuum pumps for rapid chamber evacuation to 0.1 torr in approximately five minutes. High vacuum diffusion, cryogenic, or turbomolecular pumps can be provided on request.
 
Gas phase bonding furnaces are provided with gas flow control systems including pressure interlocks to prevent runaway gas consumption. Optional gas pressure control systems are available for fully automatic operation, complete with a flow interlock for protection from excessive reaction rates. A flow totalizer can also be added to log total gas consumption and signal run completion.
 
Liquid phase bonding furnaces are not provided with nitrogen gas demand systems on standard models. An automatic backfill system is included for processing near atmospheric pressure with inert gas. Both gas pressure and gas flow control systems are optionally available.
 
Reaction bonding furnaces must be equipped with a hydrogen gas safety system if explosive concentrations of reducing gases will be present. This optional system includes a blowoff port, burnoff tower, and extensive safety interlocks.                                                                  
          
   


Standard Gas Flow Control System
Standard Gas Flow Control System



Optional Gas Pressure Control System
Optional Gas Pressure Control System

Special Features

          • Either tungsten or graphite elements  for long life
• Choice of gas flow control or pressure control
• Convenient loading from either top, front or bottom
• Durable tungsten key shield on metallic heat zones
• Optional graphite retort for vapor containment
• Automatic protection from runaway exothermic reaction
• Complete instrumentation package including temperature sensor, programable proprocessor and gas controls
                                       

1500 PSI
 

Reaction bonding can be performed with internal furnace pressures up to 1500 psi. Thermal Technology’s furnaces use graphite heat zones and ASME code stamped pressure vessels for safe and reliable high temperature processing. Four standard furnace models are available with capacities from 0.1 ft3 to 3.5ft3. Reactive gas supply systems will be designed to meet individual requirements. 
 
Custom Furnace Design

Thermal Technology is leading supplier of reaction bonding furnaces. Building on this experience, our engineering team can design a custom furnace system to meet your exact requirements. When your needs exceed the capabilities of our standard models, you can count on receiving the same quality and reliability in a customized system.
 
Extensive design, fabrication, and testing skills are available for use in developing furnaces built for a specific application. Our custom designed furnaces are located at national laboratories and major corporations around the world. When you need the best—call Thermal Technology.

 
    Custom Furnace Design

Notes:
  1. Includes furnace, power supply, control cabinet, and pumping system. Exact dimensions depend on choice of accessories. Components can be re-arranged to different dimensions to suit individual requirements.
  2. Alternate power supplies, pumps, and fans may require different inputs.
  3. Water must be clean and free of contamination and minerals, regulated to 50psig, and 70°F maximum temperature.

Model 161648W-WM open door

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Model
161648W-WM
open door

Model 161648W-WM

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Model
161648W-WM

 Model 121212W-WW

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 Model
121212W-WW

 Model 121212W-WW Interior

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 Model
121212W-WW
interior

All specifications are subject to change.  Final quotation will be the governing document in all cases.
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